Reliability of MEMS (Record no. 2055)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01837nam a22002297a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20240215111127.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 240215b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783527335015 (PB) |
| 041 ## - LANGUAGE CODE | |
| Language code of original | eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 620.5 |
| Item number | TAB |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Tabata,Osamu |
| 245 ## - TITLE STATEMENT | |
| Title | Reliability of MEMS |
| Remainder of title | Testing of Materials and Devices |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Wiley |
| Date of publication, distribution, etc. | 2013 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Page number | xx,303 p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | (Advanced Micro & Nanosystems) |
| 505 ## - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Evaluation of Mechanical Properties of MEMS Materials and Their Standardization<br/>Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems<br/>Thin film Characterization Using the Bulge Test<br/>Uniaxial Tensile Test for MEMS Materials<br/>On-chip Testing of MEMS<br/>Reliability of a Capacitive Pressure Sensor<br/>Inertial Sensors<br/>High-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator<br/>Reliability of MEMS Variable Optical Attenuator (pages 239-266)<br/>Eco Scan MEMS Resonant Mirror |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Physics Atomic & Molecular |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | MEMS Materials |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tsuchiya,Toshiyuki |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Books |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| -- | 6091 |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Inventory number | Total Checkouts | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Currency | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Non-fiction | IIITDM Kurnool | IIITDM Kurnool | 14.02.2024 | Technical Bureau India | 5936.25 | TB3240 dated 09.01.2024 | 620.5 TAB | 0005402 | 15.02.2024 | 6036.27 | 14.02.2024 | INR | Books |