Microsensors Mems And Smart Devices
Material type:
TextOriginal language: English Publication details: Delhi Wiley india Pvt. Ltd 2001Description: xvi, 503 pISBN: - 9788126540822
- 621.381 GAR
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| 621.381 FLO FUNDAMENTALS OF ANALOG CIRCUITS | 621.381 FLO FUNDAMENTALS OF ANALOG CIRCUITS | 621.381 FRA Data Converters | 621.381 GAR Microsensors Mems And Smart Devices | 621.381 GIB Beginner's guide to reading schematics / | 621.381 GIB Beginner's guide to reading schematics / | 621.381 GIB Beginner's guide to reading schematics / |
Introduction Electronic Materials and Processing MEMS Materials and their Preparation Standard Microelectronic Technologies Silicon Micromachining:Bulk Silicon Micromachining: Surface Microstereolithography for MEMS Microsensors Introduction to SAW Devices Surface Acoustic Waves in Solids IDT Microsensor Parameter Measurement IDT Microsensor Fabrication IDT Microsensors MEMS-IDT Microsensors Smart Sensors and MEMS Appendices Index
From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem.
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