Senturia,Stephen D. <br/><br/>
Microsystem design 

 - Boston  Kluwer Academic Publishers,  2001 
 - xxvi, 689 p 
<br/><br/>Foreword. Preface. Acknowledgments. Part I: Getting Started. 1. Introduction. 2. An Approach to MEMS Design. 3. Microfabrication. 4. Process Integration. Part II: Modeling Strategies. 5. Lumped Modeling. 6. Energy-Conserving Transducers. 7. Dynamics. Part III: Domain-Specific Details. 8. Elasticity. 9. Structures. 10. Energy Methods. 11. Dissipation and the Thermal Energy Domain. 12. Lumped Modeling of Dissipative Processes. 13. Fluids. Part IV: Circuit and System Issues. 14. Electronics. 15. Feedback Systems. 16. Noise. Part V: Case Studies. 17. Packaging. 18. A Piezoresistive Pressure Sensor. 19. A Capacitive Accelerometer. 20. Electrostatic Projection Displays. 21. A Piezoelectric Rate Gyroscope. 22. DNA Amplification. 23. A Microbridge Gas Sensor. Appendices: A. Glossary of Notation. B. Electromagnetic Fields. C. Elastic Constants in Cubic Material. References. Index. 
<br/><br/> It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. 
<br/><br/><label>ISBN: </label>9781475774580 (PB) 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Microelectromechanical systems Design and construction<br/>ELECTROMECHANICAL DEVICES<br/>MICRO MECHANICS
<br/><br/><label>Dewey Class. No.: </label> / SEN