Reliability of MEMS Testing of Materials and Devices

By:

Tabata,Osamu

Contributor(s):

Tsuchiya,Toshiyuki

Material type: Text

TextOriginal language: English Series: (Advanced Micro & Nanosystems)Publication details: Wiley 2013Description: xx,303 pISBN:

9783527335015 (PB)

Subject(s):

DDC classification:

620.5 TAB

Contents:

Evaluation of Mechanical Properties of MEMS Materials and Their Standardization Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems Thin film Characterization Using the Bulge Test Uniaxial Tensile Test for MEMS Materials On-chip Testing of MEMS Reliability of a Capacitive Pressure Sensor Inertial Sensors High-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator Reliability of MEMS Variable Optical Attenuator (pages 239-266) Eco Scan MEMS Resonant Mirror

Summary: This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIITDM Kurnool	Non-fiction	620.5 TAB (Browse shelf(Opens below))	Available		0005402

Evaluation of Mechanical Properties of MEMS Materials and Their Standardization
Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems
Thin film Characterization Using the Bulge Test
Uniaxial Tensile Test for MEMS Materials
On-chip Testing of MEMS
Reliability of a Capacitive Pressure Sensor
Inertial Sensors
High-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator
Reliability of MEMS Variable Optical Attenuator (pages 239-266)
Eco Scan MEMS Resonant Mirror

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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